US Patent Issued to ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE on Feb. 24 for "MEMS gas sensor and manufacturing method thereof" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,567, issued on Feb. 24, was assigned to ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE (Daejeon, South Korea).

"MEMS gas sensor and manufacturing method thereof" was invented by Seungeon Moon (Daejeon, South Korea), Jeong Hun Kim (Daejeon, South Korea) and Jong Pil Im (Daejeon, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are a MEMS gas sensor and a manufacturing method thereof. The MEMS gas sensor includes a substrate having a recess, a membrane disposed in the recess and having a through-hole configured to expose a portion of a top surface of the substrate, which is disposed at a central portion of the recess, sensin...