US Patent Issued to EBARA on Sept. 15 for "Method of detecting leakage of substrate holder" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,736,431, issued on Sept. 15, was assigned to EBARA Corp. (Tokyo).

"Method of detecting leakage of substrate holder" was invented by Yosuke Nagasawa (Tokyo), Tensei Sato (Tokyo) and Ryuya Koizumi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a method of detecting a leakage of a substrate holder in an apparatus for plating. The method of detecting the leakage comprises: placing the substrate holder that holds a substrate, into a tank that is filled with a liquid; supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate; and taking an image of the liquid surroundi...