US Patent Issued to EBARA on Oct. 20 for "Abrasion detection device, abrasion detection method, substrate cleaning device, and substrate cleaning method" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,766,573, issued on Oct. 20, was assigned to EBARA Corp. (Tokyo).

"Abrasion detection device, abrasion detection method, substrate cleaning device, and substrate cleaning method" was invented by Saki Miyagawa (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An abrasion detection device is provided, including: one or more sensors, outputting a measurement value in accordance with abrasion of a substrate cleaning tool; a pressing mechanism, pressing the substrate cleaning tool against the sensor; and a determination part, performing a determination on whether it is necessary to replace the substrate cleaning tool in accordance with the measurement val...