US Patent Issued to EBARA on March 31 for "Pusher, transfer device, and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,589,464, issued on March 31, was assigned to EBARA Corp. (Tokyo).

"Pusher, transfer device, and substrate processing apparatus" was invented by Kuniaki Yamaguchi (Tokyo), Kentaro Asano (Tokyo) and Dai Yoshinari (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A pusher that holds a substrate includes: a pusher body, and a plurality of seating members that is attached to the pusher body and on which a substrate is seated. Each of the plurality of seating members includes: a pedestal member including a seating portion on which the substrate is seated and a magnet disposed at a position different from the seating portion, and supported by the pusher b...