US Patent Issued to EBARA on March 17 for "Method of liquid management in anode chamber and apparatus for plating" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,699, issued on March 17, was assigned to EBARA Corp. (Tokyo).

"Method of liquid management in anode chamber and apparatus for plating" was invented by Masaki Tomita (Tokyo) and Yasuyuki Masuda (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a method of liquid management in an anode chamber. The method comprises providing a plating tank that comprises an anode; a barrier membrane placed to come into contact with or to be brought into close contact with an upper face of the anode; a cathode chamber on an upper side and an anode chamber on a lower side parted by the barrier membrane; and an exhaust path provided to communicate ...