US Patent Issued to EBARA on March 17 for "Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,952, issued on March 17, was assigned to EBARA Corp. (Tokyo).

"Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method" was invented by Keiji Maishigi (Tokyo), Tetsuro Sugiura (Tokyo), Katsuaki Usui (Tokyo), Masahiro Hatakeyama (Tokyo), Chikako Honma (Tokyo), Toru Osuga (Tokyo), Koichi Iwasaki (Tokyo) and Jie Yuan Lin (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product ...