US Patent Issued to EBARA on June 23 for "Information processing device, substrate processing device, and information processing method" (Japanese Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,780, issued on June 23, was assigned to EBARA Corp. (Tokyo).

"Information processing device, substrate processing device, and information processing method" was invented by Hirofumi Otaki (Tokyo), Sho Ichinose (Tokyo) and Takamasa Nakamura (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing device generates a substrate processing schedule for sequentially performing respective processes on a predetermined number of substrates in a substrate processing device. The information processing device includes a substrate processing time acquisition part which acquires polishing time and finishing time based on recipe information;...