US Patent Issued to EBARA on July 28 for "Substrate holder, apparatus for plating, method of plating and storage medium" (Japanese Inventor)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,618, issued on July 28, was assigned to EBARA Corp. (Tokyo).

"Substrate holder, apparatus for plating, method of plating and storage medium" was invented by Naoto Takahashi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "One object of the present disclosure is to suppress or prevent a plating solution from entering a sealed space of a substrate holder and to detect entry of the plating solution promptly. There is provided a substrate holder configured to hold a substrate and cause the substrate to come into contact with a plating solution and to be plated. The substrate holder comprises an internal space configured to place an outer circumfere...