US Patent Issued to DISPELIX on June 23 for "Method for fabricating a blazed grating" (Finnish Inventor)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,567, issued on June 23, was assigned to DISPELIX OY (Finland).

"Method for fabricating a blazed grating" was invented by Ismo Vartiainen (Helsinki).

According to the abstract* released by the U.S. Patent & Trademark Office: "This disclosure relates to a method (100) for fabricating a blazed grating. The method (100) comprises providing a substrate and a patterned mask layer (110) on the substrate, performing primary dry etching (120) of the substrate such that primary ions are accelerated towards a primary etch direction to impinge on the substrate, and performing secondary dry etching (150) of the substrate such that secondary ions are accelerated towards a secondary etch direct...