ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,481, issued on May 19, was assigned to DISCO Corp. (Tokyo).
"Chuck table and manufacturing method of chuck table" was invented by Masaru Nakamura (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A chuck table includes a holding plate having a holding surface for holding the wafer under suction, and a frame body that supports the holding plate thereon and transmits a negative pressure or a positive pressure to the holding surface. The holding plate is formed such that a plurality of cleaved portions are included through cleavage of the holding plate into a plurality of blocks along a plurality of modified layers formed by applying a laser beam of...