ALEXANDRIA, Va., June 2 -- United States Patent no. 12,643,263, issued on June 2, was assigned to DISCO Corp. (Tokyo).
"Beta Gallium oxide substrate manufacturing method" was invented by Yuya Seto (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A Beta gallium oxide substrate manufacturing method for manufacturing a substrate from a workpiece formed of Beta gallium oxide includes a separation layer forming step of applying a laser beam of such a wavelength as to be transmitted through the Beta gallium oxide to the workpiece, with a focal point of the laser beam positioned at a predetermined depth from a front surface of the workpiece, to thereby form a separation layer including a modified part and a cr...