ALEXANDRIA, Va., April 15 -- United States Patent no. 12,599,989, issued on April 14, was assigned to DISCO Corp. (Tokyo).
"Laser processing method that includes use of a sheet that has transmissibility" was invented by Masaru Nakamura (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing method includes a holding step of holding a workpiece by a chuck table including a holding surface that holds the workpiece in an upper surface and a sheet covering step of covering the upper surface of the chuck table in addition to the workpiece by a sheet having transmissibility. The processing method also includes a close contact step of generating a suction force for the holding surface of the chuck table ...