US Patent Issued to DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY on Sept. 29 for "Magnetron sputtering apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,747,493, issued on Sept. 29, was assigned to DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY (Daegu, South Korea).

"Magnetron sputtering apparatus" was invented by June Seo Kim (Daegu, South Korea) and Joon Woo Kim (Daegu, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A magnetron sputtering apparatus according to an embodiment of the present disclosure includes a chamber accommodating sputter gas and providing an internal space in which a workpiece is arranged, an ion source unit including a sputtering target providing a deposition material to the workpiece by an electric field formed in the internal space and a magnet arranged at one ...