US Patent Issued to Cymer on Sept. 22 for "Apparatus for and method of vibration cancellation for laser wavelength and bandwidth stability" (California Inventor)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,032, issued on Sept. 22, was assigned to Cymer LLC (San Diego).

"Apparatus for and method of vibration cancellation for laser wavelength and bandwidth stability" was invented by Mohammad Amin Khamehchi (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for and method of reducing the effects of vibrations on components in modules of a deep ultraviolet light source. The components are provided with sensors (325,335) to sense vibration waveforms and actuators (320,330) for applying a waveform opposed to and so cancelling the vibration waveform. In addition to application of active noise (vibration) cancellation the vibration wavefo...