ALEXANDRIA, Va., April 7 -- United States Patent no. 12,597,754, issued on April 7, was assigned to Cymer LLC (San Diego).
"Predictive control of a pulsed light beam" was invented by Kuo-Tai Teng (Poway, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In some general aspects, a light beam control apparatus includes: a spectral feature actuator associated with a set of different states, each state configured to cause an optical apparatus to generate one or more pulses of a light beam at a discrete value of a spectral feature of the light beam; and a controller in communication with the spectral feature actuator. The controller includes: an actuator drive module configured to cause the spectral feature a...