US Patent Issued to CoorsTek KK on Sept. 1 for "Ceramic sintered body for semiconductor production equipment and manufacturing method thereof" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,725,763, issued on Sept. 1, was assigned to CoorsTek KK (Tokyo).

"Ceramic sintered body for semiconductor production equipment and manufacturing method thereof" was invented by Manami Sugiyama (Kariya City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A ceramic sintered body for semiconductor production equipment and a manufacturing method thereof capable of giving a high-density oxyfluoride ceramic sintered body without any peculiar circumstances. The ceramic sintered body for semiconductor production equipment of the present invention has a main phase of an oxyfluoride with a polycrystalline structure having 50% or more of crystals with a grai...