US Patent Issued to CHANGXIN MEMORY TECHNOLOGIES on April 7 for "Method, apparatus and system for processing semiconductor structure" (Chinese Inventor)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,596,305, issued on April 7, was assigned to CHANGXIN MEMORY TECHNOLOGIES INC. (Beijing).

"Method, apparatus and system for processing semiconductor structure" was invented by Jing Liu (Hefei, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to the technical field of semiconductors, and to a method, apparatus and system for processing a semiconductor structure. The processing method of the disclosure includes: providing a semiconductor substrate; forming a photoresist layer on the semiconductor substrate, the photoresist layer including an edge area and a middle area that are adjacently distributed, the edge area including a pr...