ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,732,678, issued on Sept. 8, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).
"Peltier module, assembly, and apparatus for mask inspection" was invented by Lutz Brekerbohm (Hardegsen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a Peltier module, to an assembly and to an apparatus for mask inspection. A Peltier module according to the invention has a plurality of Peltier pellets, which are made of a semiconductor material and are arranged between a first plate forming a hot side and a second plate forming a cold side, wherein the first plate and the second plate are each made of a metallic material, and wherei...