US Patent Issued to Carl Zeiss SMT on Oct. 6 for "Mirror, optical system and method for operating an optical system" (German Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,754,483, issued on Oct. 6, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Mirror, optical system and method for operating an optical system" was invented by Hartmut Enkisch (Aalen, Germany), Toralf Gruner (Aalen-Hofen, Germany) and Bernhard Gellrich (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A mirror, such as for a microlithographic projection exposure apparatus, comprises an optical effective surface. The mirror comprises a mirror substrate and a plurality of cavities in the mirror substrate. Fluid can be applied to each cavity. A deformation is transferable to the optical effective surface by varying the fluid pressure ...