US Patent Issued to Carl Zeiss SMT on Oct. 27 for "Temperature measuring device, lithography apparatus and method for measuring a temperature" (German Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,774,927, issued on Oct. 27, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Temperature measuring device, lithography apparatus and method for measuring a temperature" was invented by Lars Berger (Aalen-Unterkochen, Germany) and Thomas Rettenmaier (Aalen-Dewangen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A temperature measuring device for measuring a temperature at or in an optical system of a lithography apparatus comprises: an activation source for generating a measurement current or a measurement voltage between a first and a second connection point of the activation source; a plurality of temperature resistors which compris...