US Patent Issued to Carl Zeiss SMT on Oct. 27 for "Method for measuring an illumination angle distribution on an object field and illumination optics unit having an illumination channel allocation intended therefor" (German Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,775,215, issued on Oct. 27, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method for measuring an illumination angle distribution on an object field and illumination optics unit having an illumination channel allocation intended therefor" was invented by Robert Buschlinger (Oberkochen, Germany), Michael Ramolla (Oberkochen, Germany) and Joerg Zimmermann (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "To measure an illumination angle distribution, which is established via a multiplicity of illumination channels of an illumination optics unit, on an object field via an obscured projection optics unit, a setpoint pupil lighting...