US Patent Issued to Carl Zeiss SMT on March 17 for "Method for calibrating a manipulable optical module" (German Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,654, issued on March 17, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method for calibrating a manipulable optical module" was invented by Matthias Manger (Aalen, Germany) and Regina Christ (Aalen-Unterkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for calibrating a manipulable optical module for a microlithographic projection exposure apparatus, which comprises at least one manipulation element for setting an at least one-dimensional local variation profile of an optical property of the optical module is provided. The method comprises: applying a temporally varying excitation signal to the at least one manip...