US Patent Issued to Carl Zeiss SMT on June 23 for "Method and apparatus for analyzing an image of a microlithographic microstructured component" (German Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,664,637, issued on June 23, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method and apparatus for analyzing an image of a microlithographic microstructured component" was invented by Mario Laengle (Jena, Germany) and Dmitry Klochkov (Schwaebisch Gmuend, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a method and to an apparatus for analyzing an image of a microlithographic microstructured component wherein in the image each of a multiplicity of pixels is assigned in each case an intensity value. A method according to the invention comprises the following steps: isolating a plurality of edge fragments in th...