US Patent Issued to Carl Zeiss SMT on July 14 for "Component of an optical system" (German Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,681,390, issued on July 14, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Component of an optical system" was invented by Matthias Kestel (Dresden, Germany), Matthias Mueller (Lauchheim, Germany), Roland Gischa (Bibertal, Germany), Philipp Weishaupt (Ingolstadt, Germany) and Thomas Stuebler (Haunsfeld, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A component of an optical system comprises an optical element and a first channel system outside the optical element and through which a cooling fluid can flow, such that, during operation of the optical system, heat generated by electromagnetic radiation incident on the optical element ...