ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,864, issued on Feb. 24, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).
"Method for ascertaining an image of an object" was invented by Christoph Husemann (Jena, Germany), Dirk Seidel (Jena-Leutra, Germany) and Marco Mout (Aalen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "To ascertain an image of an object which emerges when the object is illuminated with illumination light from a partly coherent light source with a target illumination setting having an illumination-side numerical aperture NA_illu and an imaging-side numerical aperture NA_detection, the following procedure is performed: initially, a section of the object is il...