US Patent Issued to Carl Zeiss SMT on Aug. 11 for "Interchangeable-object holding apparatus and method for an euv metrology system" (German Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,100, issued on Aug. 11, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Interchangeable-object holding apparatus and method for an euv metrology system" was invented by Johann Irnstetter (Heidenheim an der Brenz, Germany), Thomas Gebhard (Aalen, Germany), Marcel Vogt (Langenau, Germany), Andreas Daubenschuz (Drackenstein, Germany) and Manuel Best (Niederstotzingen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An interchangeable-object holding apparatus for an EUV metrology system for holding and providing an interchangeable object, which is intended to be used interchangeably within the EUV metrology system. A calibration devic...