ALEXANDRIA, Va., April 7 -- United States Patent no. 12,596,309, issued on April 7, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).
"Support for an optical element" was invented by Rodolfo Guglielmi Rabe (Aalen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A connection arrangement for connecting a first component and a second component of an imaging device for micro lithography, such as for using light in the extreme UV range (EUV), includes a connection unit having a first contact portion, a second contact portion and a coupling portion."
The patent was filed on Jan. 22, 2024, under Application No. 18/418,734.
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