US Patent Issued to Carl Zeiss SMT on April 21 for "Sensor arrangement for arrangement on a measurement chamber, apparatus for qualifying a mask and method for qualifying a mask" (German Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,607,570, issued on April 21, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Sensor arrangement for arrangement on a measurement chamber, apparatus for qualifying a mask and method for qualifying a mask" was invented by Lutz Brekerbohm (Hardegsen, Germany) and Ulrich Matejka (Jena, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A sensor arrangement for arrangement on a measurement chamber, wherein the sensor arrangement comprises: a sensor; an intake opening; an outlet; and a fluid connection between the intake opening and the outlet."

The patent was filed on Feb. 29, 2024, under Application No. 18/591,212.

*For further informatio...