US Patent Issued to Carl Zeiss MultiSEM on March 24 for "Certain improvements of multi-beam generating and multi-beam deflecting units" (German, Swiss Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,749, issued on March 24, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Certain improvements of multi-beam generating and multi-beam deflecting units" was invented by Yanko Sarov (Aalen, Germany), Ulrich Bihr (Dirgenheim, Germany), Hans Fritz (Grabs, Switzerland), Dirk Zeidler (Oberkochen, Germany), Georg Kurij (Ulm, Germany), Ralf Lenke (Lauchheim, Germany), Andras G. Major (Oberkochen, Germany) and Christof Riedesel (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "Certain improvements of multi-beam raster units such as multi-beam generating units and multi-beam deflector units of a multi-beam charged particle micro...