ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,159, issued on June 23, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).
"Multi-beam particle beam system" was invented by Dirk Zeidler (Oberkochen, Germany) and Thomas Schmid (Oberkochen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-beam particle beam system comprises a particle beam source for creating a beam of charged particles, and a beam splitter for splitting the beam into a bundle of particle beams. The beam splitter comprises a multi-aperture plate having openings. A particle optical unit is provided to focus each of the particle beams in an object plane. A correction optical unit is provided for compensatin...