US Patent Issued to Carl Zeiss MultiSEM on Aug. 25 for "Method for operating a multi-beam particle microscope with fast closed-loop beam current control, computer program product and multi-beam particle microscope" (German, Swiss Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,015, issued on Aug. 25, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Method for operating a multi-beam particle microscope with fast closed-loop beam current control, computer program product and multi-beam particle microscope" was invented by Ingo Mueller (Aalen, Germany), Nicolas Kaufmann (Aalen, Germany), Michael Behnke (Eislingen, Germany) and Hans Fritz (Grabs, Switzerland).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for operating a multi-beam particle microscope which operates using a plurality of individual charged particle beams, wherein the method includes the following steps: measuring the beam current; deter...