US Patent Issued to Carl Zeiss MultiSEM on April 21 for "Multi-beam charged particle system and method of controlling the working distance in a multi-beam charged particle system" (German Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,282, issued on April 21, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Multi-beam charged particle system and method of controlling the working distance in a multi-beam charged particle system" was invented by Michael Behnke (Oberkochen, Germany), Ulrich Bihr (Oberkochen, Germany), Christof Riedesel (Oberkochen, Germany), Arne Thoma (Oberkochen, Germany) and Dirk Zeidler (Oberkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-beam charged particle system and a method of setting a working distance WD of the multi beam charged particle system are provided. With the method, the working distance is adjusted while ...