ALEXANDRIA, Va., April 15 -- United States Patent no. 12,603,245, issued on April 14, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).
"Multiple particle beam system with a contrast correction lens system" was invented by Stefan Schubert (Oberkochen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A multiple particle beam system comprises a magnetic immersion lens and a detection system. A cross-over of the second individual particle beams is provided in the secondary path between the beam switch and the detection system, and a contrast aperture with a central cutout for cutting out the secondary beams is arranged in the region of the cross-over. A contrast correction lens system with a...