US Patent Issued to Carl Zeiss Microscopy on March 3 for "Gas feed device, system having a gas feed device, and particle beam apparatus having a gas feed device or the system" (German Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,564,869, issued on March 3, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany).

"Gas feed device, system having a gas feed device, and particle beam apparatus having a gas feed device or the system" was invented by Andreas Schmaunz (Oberkochen, Germany), Gero Walter (Westhausen, Germany), Bernd Stenke (Illertissen, Germany) and Gerald Schmid (Blaustein, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas feed device includes a feed unit that feeds a gaseous state of a first precursor and/or a gaseous state of a second precursor, a first line device that conducts the gaseous state of the first precursor to the feed unit and a second line...