US Patent Issued to Carl Zeiss Microscopy on Feb. 24 for "Gas supply device, particle beam apparatus having a gas supply device, and method of operating the gas supply device and the particle beam apparatus" (German Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,337, issued on Feb. 24, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany).

"Gas supply device, particle beam apparatus having a gas supply device, and method of operating the gas supply device and the particle beam apparatus" was invented by Andreas Schmaunz (Oberkochen, Germany), Gero Walter (Westhausen, Germany), Bernd Stenke (Illertissen, Germany) and Gerald Schmid (Blaustein, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The system described herein relates to a gas feed device having a first precursor reservoir that receives a first precursor and having a second precursor reservoir that receives a second precursor, a feed unit ...