US Patent Issued to CANON on May 19 for "Method of diagnosing failure location of control apparatus, diagnostic apparatus, control apparatus, lithography apparatus, article manufacturing method, and non-transitory computer-readable storage medium" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,631,972, issued on May 19, was assigned to CANON K.K. (Tokyo).

"Method of diagnosing failure location of control apparatus, diagnostic apparatus, control apparatus, lithography apparatus, article manufacturing method, and non-transitory computer-readable storage medium" was invented by Yasunobu Asakura (Tochigi, Japan), Hirokazu Kusayanagi (Tochigi, Japan), Takumi Hashimoto (Saitama, Japan) and Tomoyasu Hata (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of diagnosing a failure location of a control apparatus including a plurality of actuators each configured to apply a thrust to a target object, a plurality of sensors each confi...