US Patent Issued to CANON on March 24 for "Determining apparatus, pattern forming apparatus, and method for manufacturing article" (Japanese Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,585,203, issued on March 24, was assigned to CANON K.K. (Tokyo).

"Determining apparatus, pattern forming apparatus, and method for manufacturing article" was invented by Takahiro Yamamoto (Tochigi, Japan) and Mitsuru Inose (Ibaraki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In order to provide a determining apparatus capable of determining whether there is a foreign substance on a substrate stage with suppressing a decrease in productivity of an apparatus, the determining apparatus according to the present invention is configured to determine a state of a surface of each of a first substrate stage and a second substrate stage based on a firs...