US Patent Issued to CANON on July 14 for "Cooling device, semiconductor manufacturing apparatus, and semiconductor manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,156, issued on July 14, was assigned to CANON K.K. (Tokyo).

"Cooling device, semiconductor manufacturing apparatus, and semiconductor manufacturing method" was invented by Makoto Nomoto (Utsunomiya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cooling device includes a tank, a first path configured to circulate a liquid-phase refrigerant by a pump so as to extract the liquid-phase refrigerant from the tank, cool the liquid-phase refrigerant, and return the liquid-phase refrigerant to the tank, and a second path branched from the first path. The second path includes a heater configured to heat the liquid-phase refrigerant supplied from the ...