US Patent Issued to CANON on Aug. 4 for "Film forming method, article manufacturing method, supply device, film forming apparatus, and substrate" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,699,317, issued on Aug. 4, was assigned to CANON K.K. (Tokyo).

"Film forming method, article manufacturing method, supply device, film forming apparatus, and substrate" was invented by Jun Kato (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a film forming method of forming a film on a substrate, wherein the substrate includes a region including a first concave portion and a second concave portion, the first concave portion has a width larger than that of the second concave portion, and the film forming method includes: selectively supplying a first material into the first concave portion and molding the firs...