US Patent Issued to Canon Anelva on March 17 for "Sputtering apparatus" (Japanese, American Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,168, issued on March 17, was assigned to Canon Anelva Corp. (Kawasaki, Japan).

"Sputtering apparatus" was invented by Susumu Karino (Tokyo), Tetsuro Toda (San Jose, Calif.) and Tooru Fujihara (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A sputtering apparatus includes a first target holder configured to hold a first target such that a first surface of the first target faces the processing space, and a second target holder configured to hold a second target such that a second surface of the second target faces the processing space, wherein the first target holder holds the first target such that an orthogonal projection vector of a first no...