US Patent Issued to CANON ANELVA on April 21 for "Film forming apparatus, control apparatus for film forming appartus, and film forming method" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,606,904, issued on April 21, was assigned to CANON ANELVA Corp. (Kanagawa, Japan).

"Film forming apparatus, control apparatus for film forming appartus, and film forming method" was invented by Hiroshi Yakushiji (Kanagawa, Japan), Reiji Sakamoto (Kanagawa, Japan) and Masahiro Shibamoto (Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A film forming apparatus has a process chamber and a processing unit provided in the process chamber and forming adhesive film. The surface of the inner walls of the process chamber is formed of a material having a large getter effect on gas or water (H2O) remaining in the process chamber."

The patent was f...