US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on March 17 for "Grid assembly for plasma processing apparatus" (California Inventor)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,157, issued on March 17, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc. (Fremont, Calif.).

"Grid assembly for plasma processing apparatus" was invented by Maolin Long (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A grid assembly for injecting process gas to a chamber. The grid assembly including a gas inlet for delivering the process gas to the grid assembly, a plurality of nozzles extending vertically through at least a portion of the grid assembly, and a plurality of layers in a vertical stacked arrangement. The plurality of layers including a top layer including one or...