ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,747,154, issued on Sept. 29, was assigned to BEIJING BOE TECHNOLOGY DEVELOPMENT Co. LTD. (Beijing) and BOE TECHNOLOGY GROUP Co. LTD. (Beijing).
"Micro-electro-mechanical system and manufacturing method thereof" was invented by Wenbo Li (Beijing), Hanbing Zhang (Beijing), Long Wang (Beijing), Jindou Liu (Beijing) and Yanzhao Li (Beijing).
According to the abstract* released by the U.S. Patent & Trademark Office: "A micro-electro-mechanical system and a manufacturing method thereof. The micro-electro-mechanical system includes a comb tooth structure, a spring structure, and an electrode structure. The comb tooth structure includes first comb teeth and second comb teeth arranged altern...