US Patent Issued to Azur Space Solar Power on Feb. 24 for "Metalorganic chemical vapor phase deposition apparatus having bubbler with first supply section leading to reactor, first, second and third mass flow controller and pressure sensor" (German Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,559,862, issued on Feb. 24, was assigned to Azur Space Solar Power GmbH (Heilbronn, Germany).

"Metalorganic chemical vapor phase deposition apparatus having bubbler with first supply section leading to reactor, first, second and third mass flow controller and pressure sensor" was invented by Clemens Waechter (Lauffen am Neckar, Germany) and Jan Strate (Heilbronn, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A Metalorganic chemical vapor phase epitaxy or vapor phase deposition apparatus, having a first gas source system, a reactor, an exhaust gas system, and a control unit, wherein the first gas source system has a carrier gas source, a bubbler...