ALEXANDRIA, Va., June 9 -- United States Patent no. 12,651,722, issued on June 9, was assigned to Axcelis Technologies Inc. (Beverly, Mass.).
"Blended energy implant" was invented by James S DeLuca (Beverly, Mass.), Dwight Roh (North Andover, Mass.), Patrick Heres (Boxford, Mass.) and Atul Gupta (Lexington, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Ion implantation systems and methods implant varying energies of an ion beam across a workpiece in a serial single-workpiece end station, where electrodes of an acceleration/deceleration stage, bend electrode and/or energy filter control a final energy or path of the ion beam to the workpiece. The bend electrode or an energy filter can form part of the ...