US Patent Issued to Axcelis Technologies on Aug. 4 for "Method and apparatus for continuous chained energy ion implantation" (California, New Hampshire, Massachusetts Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,562, issued on Aug. 4, was assigned to Axcelis Technologies Inc. (Beverly, Mass.).

"Method and apparatus for continuous chained energy ion implantation" was invented by Causon Jen (San Jose, Calif.), James S. DeLuca (Beverly, Mass.) and William Bintz (Londonderry, N.H.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ion implantation system and method that selectively varies an ion beam energy to a workpiece in sequential passes thereof in front of the beam. The implantation system has an ion source for generating the ion beam and an acceleration/deceleration stage for varying the energy of the ion beam based on an electrical bias supplied to the ac...