ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,713,870, issued on Aug. 18, was assigned to Axcelis Technologies Inc. (Beverly, Mass.).
"System and method of verifying workpiece alignment" was invented by Yusef Nouri (Beverly, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A workpiece processing system and method are disclosed for determining an alignment of a workpiece upon a workpiece support using a retractable sensor. A sensor moves in/out relative to an edge of the workpiece support to obtain positional data while the workpiece support is rotated. Based on the positional data, the alignment of the workpiece and workpiece support may be determined. After determining the alignment, the senso...