ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,729,948, issued on Sept. 8, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Method to determine an absolute position of a movable object, interferometer system, projection system and lithograpic apparatus" was invented by Maarten Jozef Jansen (Hoogeloon, Netherlands) and Willem Herman Gertruda Anna Koenen (Roermond, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method to determine an absolute position of a first movable object using an interferometer system is described, said method comprising: providing first and second beams with a first light frequency from a first light source; providing further first and further seco...