US Patent Issued to ASML NETHERLANDS on Sept. 15 for "Method and apparatus for inspection and metrology" (Dutch, German Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,737,430, issued on Sept. 15, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Method and apparatus for inspection and metrology" was invented by Everhardus Cornelis Mos (Best, Netherlands), Velislava Ignatova (Eindhoven, Netherlands), Erik Jensen (Veldhoven, Netherlands), Michael Kubis (Meerbusch, Germany), Hubertus Johannes Gertrudus Simons (Venlo, Netherlands), Peter Ten Berge (Eindhoven, Netherlands), Erik Johannes Maria Wallerbos (Helmond, Netherlands) and Jochem Sebastiaan Wildenberg (Aarle-Rixtel, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method including evaluating, with respect to a parameter representing rema...