US Patent Issued to ASML NETHERLANDS on Oct. 6 for "Integrated optical system for scalable and accurate inspection systems" (Dutch, American Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,754,485, issued on Oct. 6, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Integrated optical system for scalable and accurate inspection systems" was invented by Saman Jahani (Stamford, Conn.), Roxana Rezvani Naraghi (Easton, Conn.), Stephen Roux (New Fairfield, Conn.), Justin Lloyd Kreuzer (Trumbull, Conn.) and Jorn Paul Van Engelen (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection system includes a radiation source, an integrated optical system, and first and second detectors. The radiation source generates radiation to irradiate a target. The integrated optical system includes: a substrate; first, s...